● Integrated, low-profile, XY linear motor stage
● 25 mm x 25 mm or 50 mm x 50 mm travel
● Nanometer-level performance in a large travel format
● High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis
● In-position stability of <1 nm
● Anti-creep crossed-roller bearings
● High dynamic performance
Stage Design
The ANT95-XY design allows critical elements such as orthogonality, straightness and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm or 50 mm x 50 mm) come with the 60 mm profile height. You can expect outstanding accuracy, position repeatability and in-position stability with the ANT95-XY stage.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion. The integrated cable management system is designed for long life and to minimize drag forces.
Multi-Axis Configurations
The ANT95-XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries and goniometers) to create unique, high performance, multi-axis systems.