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ANT180-L 機械軸承直驅(qū)平臺 | ANT180-L Mechanical-Bearing Direct-Drive Linear Stage | 交叉滾柱軸承直線電機直驅(qū)精密定位平臺

ANT180-L繼續(xù)擴展了Aerotech高精度交叉滾柱軸承平臺的產(chǎn)品線。具有納米級分辨率、優(yōu)越的雙向重復精度和出眾的低速性能，它是高精度校準、測量、掃描和其他要求苛刻的應(yīng)用的終極解決方案。

Mechanical Specifications

Model ANT180-160-L ANT180-210-L ANT180-260-L ANT180-360-L
Travel 160 mm 210 mm 260 mm 360 mm
Accuracy(1) LNAS PLUS ±150 nm ±150 nm ±200 nm ±200 nm
Standard ±2.0 μm ±2.5 μm ±3.0 μm ±3.5 μm
LTAS PLUS ±300 nm ±300 nm ±350 nm ±350 nm
Standard ±4.0 μm ±5.0 μm ±6.0 μm ±7.0 μm
Resolution LNAS 1 nm 1 nm 1 nm 1 nm
LTAS 3 nm 3 nm 3 nm 3 nm
Repeatability
(BiDirectional) (1) 		LNAS ±100 nm ±100 nm ±125 nm ±125 nm
LTAS ±150 nm ±150 nm ±175 nm ±175 nm
Straightness(1) ±1.0 μm ±1.25 μm ±1.5 μm ±1.75 μm
Flatness(1) ±1.0 μm ±1.25 μm ±1.5 μm ±1.75 μm
Pitch 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Roll 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Yaw 10 arc sec 10 arc sec 12 arc sec 12 arc sec
Maximum Speed 500 mm/s 500 mm/s 500 mm/s 500 mm/s
Maximum Acceleration 2 g (No Load) 2 g (No Load) 2 g (No Load) 2 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
Maximum Force (Continuous) 110.5 N 110.5 N 110.5 N 110.5 N
Load Capacity(2) Horizontal 30 kg 30 kg 30 kg 30 kg
Side 20 kg 20 kg 20 kg 20 kg
Moving Mass 6.6 kg 7.8 kg 9.2 kg 11.7 kg
Stage Mass 12.8 kg 14.9 kg 17.6 kg 22.4 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. -PLUS requires the use of an Aerotech controller.
  5. Specifications are LNAS and LTAS only. Consult factory for specifications regarding the LTX50 option.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage ±80 VDC
Limit Switches 5 V, Normally Open
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • ANT180-L

Dimensions

  • ANT180-L

Ordering Information

ANT180-L Series Linear Motor Stage

Option Description
ANT180-160-L 160 mm travel stage with linear motor and limits
ANT180-210-L 210 mm travel stage with linear motor and limits
ANT180-260-L 260 mm travel stage with linear motor and limits
ANT180-360-L 360 mm travel stage with linear motor and limits

Standard Linear Encoders

Option Description
-LTAS Amplified sine output 1 Vpp (20 μm signal period) requires signal multiplier
-LTX50 0.1 micron line driver output

High-Accuracy Linear Encoders

Option Description
-LNAS High-accuracy amplified sine output 1 Vpp (4 μm signal period) requires signal multiplier

CMS - Cable Management

Option Description
-XY Cable management system for X-Y assembly (only order with X axis)
-XY-AIR Cable management system for X-Y assembly with 6 mm air line (only order with X axis)
-XYZ Cable management system for X-Y-Z assembly (only order with X axis)
-XYZ-AIR Cable management system for X-Y-Z assembly with 6 mm air line (only order with X axis)
-Y Cable management system for X-Y assembly (only order with Y axis)
-Y-AIR Cable management system for X-Y assembly with 6 mm air line (only order with Y axis)
-YZ Cable management system for Y-Z assembly (only order with Y axis)
-YZ-AIR Cable management system for Y-Z assembly with 6 mm air line (only order with Y axis)

Accessories (to be ordered as separate line item)

Option Description
PLUS High-accuracy version
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal