ATS100 機械軸承絲杠平臺 | ATS100 Mechanical-Bearing Ball-Screw Linear Stage | 滾珠絲杠直線定位平臺
The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.
ATS100 Specifications
| Model | ATS100-050 | ATS100-100 | ATS100-150 | ATS100-200 | ||
|---|---|---|---|---|---|---|
| Travel | 50 mm | 100 mm | 150 mm | 200 mm | ||
| Drive System | Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H) | |||||
| Bus Voltage | Up to 160 VDC | |||||
| Continuous Current | Apk | Up to 2.3 A | ||||
| Arms | Up to 1.6 A | |||||
| Feedback | Noncontact Rotary Encoder (1000 line) | |||||
| Resolution | 2 mm/rev lead | 0.5 μm @ 4000 steps/rev Motor Resolution | ||||
| Maximum Travel Speed(1) | 100 mm/s | |||||
| Maximum Load(2) | Horizontal | 25.0 kg | ||||
| Vertical | 10.0 kg | |||||
| Side | 10.0 kg | |||||
| Accuracy | HALAR(3) | ±0.5 μm | ±0.5 μm | ±0.75 μm | ±1.0 μm | |
| Standard | ±2.0 μm | ±3.0μm | ±5.0 μm | ±6.0 μm | ||
| Repeatability (Bidirectional) | HALAR(3) | ±0.3 μm | ||||
| Standard | ±0.7 μm | |||||
| Straightness and Flatness | Differential | HALSF | 1.0 μm/25 mm | |||
| Standard | 2.0 μm/25 mm | |||||
|
Maximum Deviation |
HALSF | ±0.5 μm | ± 1.0 μm | ±1.5 μm | ±1.75 μm | |
| Standard | ±1.0 μm | ±2.0 μm | ±2.0 μm | ±3.0 μm | ||
| Pitch and Yaw | 5 arc sec | 8 arc sec | 10 arc sec | 12 arc sec | ||
| Nominal Stage Weight | Less Motor | 1.6 kg | 1.7 kg | 1.8 kg | 2.0 kg | |
| With Motor | 2.7 kg | 2.8 kg | 2.9 kg | 3.1 kg | ||
| Construction | Aluminum Body/Stage and Table; Clear Anodize Finish | |||||
- Excessive duty cycle may impact stage accuracy.
- Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
- Available with Aerotech controllers.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
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ATS100 Cantilevered Load Graph
Dimensions
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ATS100
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HDZ1 Bracket
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MP100 Mounting Plate
Ordering Information
Ordering Example
| ATS100 | -050 | - | -20P | -M | - | -BMS | - | -2 | -NC-9DU | -C025 |
Ordering Options
| Series | Travel (mm) | Stage Construction Options | Drive Screw | Tabletop | Motor | Foldback Options | Motor Orientation | Limits | Coupling |
|---|---|---|---|---|---|---|---|---|---|
| ATS100 |
-050 -100 -150 -200 |
/VAC3 /VAC6 /STEEL |
-20P |
-M -U |
-NM |
-FB025 |
-0 |
-NC-9DU -NC-FLY -NO-9DU -NO-FLY |
-C025 -C0375 -NONE |
ATS100 Series Linear Ball-Screw Stage-
| Option | Description |
|---|---|
| ATS100 |
The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for a broad array of industrial applications. ATS100 series stages employ a precision-ground ball screw, which is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play. |
| ATS100-050 | 50 mm (2 in) travel stage with limits |
| ATS100-100 | 100 mm (4 in) travel stage with limits |
| ATS100-150 | 150 mm (6 in) travel stage with limits |
| ATS100-200 | 200 mm (8 in) travel stage with limits |
Stage Construction (Optional)
| Option | Description |
|---|---|
| /VAC3 | Vacuum preparation of stage to 10-3 torr |
| /VAC6 | Vacuum preparation of stage to 10-6 torr |
| /STEEL | All steel construction |
Drive Screw (Required)
| Option | Description |
|---|---|
| -20P | 2 mm/rev precision-ground ball screw |
Tabletop (Required)
| Option | Description |
|---|---|
| -M | Tabletop with metric dimension mounting pattern and holes. Stage mounting base holes slotted for English and metric installation |
| -U | Tabletop with English dimension mounting pattern and holes. Stage mounting base holes slotted for English and metric installation |
Motor (Required)
| Option | Description |
|---|---|
| -NM | No motor or encoder |
| -SM | Stepping motor with connector and home marker pulse (50SMB2-HM/) |
| -BMS | Brushless servo motor with 2500-line encoder. (BMS60-A-D25-E2500H) |
| -BMS-BRK |
Brushless servo motor with 2500-line encoder and motor-mounted brake (BMS60-A-D25-E2500H-BK1) |
| -BMS-AS |
Brushless servo motor with 1000-line amplified sine encoder (BMS60-A-D25-E1000ASH) |
| -BMS-AS-BRK |
Brushless servo motor with 1000-line amplified sine encoder and motor-mounted brake (BMS60-A-D25-E1000ASH-BK1) |
| -BM | Brushless servo motor with connectors and 2500-line encoder (BM75-D25-E2500H) |
| -BM-BRK |
Brushless servo motor with connectors, 2500-line encoder, and motor-mounted brake (BM75-D25-E2500H-BK1) |
| -BM-AS |
Brushless servo motor with connectors and 2500-line encoder (BM75-D25-E1000ASH) |
| -BM-AS-BRK |
Brushless servo motor with connectors, 2500-line encoder, and motor-mounted brake (BM75-D25-E1000ASH-BK1) |
Foldback Options (Optional)
| Option | Description |
|---|---|
| -FB025 | Foldback kit for 1/4" diameter shaft NEMA 23 motor |
| -FB025-BRK | Foldback kit with brake for 1/4" diameter shaft NEMA 23 motor |
Motor Orientation (Required)
| Option | Description |
|---|---|
|
-0 |
No motor |
| -2 | Bottom cable exit (optional orientation) |
| -3 | Left side cable exit (standard orientation) |
| -4 |
Top cable exit (optional orientation) |
| -5 | Right side cable exit (optional orientation) |
| -8 | Right side fold-back (requires "FB" option, standard orientation) |
| -12 | Left side fold-back (requires "FB" option, optional orientation) |
Limits (Required)
| Option | Description |
|---|---|
| -NC-9DU | Normally closed end of travel limit switches; 9-pin D connector |
| -NC-FLY | Normally closed end of travel limit switches; flying leads |
| -NO-9DU | Normally open end of travel limit switches; 9-pin D connector |
| -NO-FLY | Normally open end of travel limit switches; flying leads |
Coupling (Required)
| Option | Description |
|---|---|
| -C025 | 0.25 in coupling |
| -C0375 | 0.375 in coupling (required for BMS100 / BM130 motor) |
| -NONE | No motor coupling |
Note: Coupling -NONE must be selected with all -FB options
Options
| Option | Description |
|---|---|
| -MP100U | English base mounting plate |
| -MP100U/VAC | VAC6 prepared English base mounting plate |
| -MP100M | Metric base mounting plate |
| -MP100M/VAC | VAC6 prepared metric base mounting plate |
Accessories (to be ordered as separate line item)
| Option | Description |
|---|---|
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-NPAZ | Non-precision XZ or YZ assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA10Z | XZ or YZ assembly with L-bracket; 10 arc second orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |
| ALIGNMENT-PA5Z | XZ or YZ assembly with L-bracket; 5 arc second orthogonal |
| HDZ1 | English right angle L-bracket (ATS100-050 thru ATS100-100) |
| HDZ1U/VAC6 | VAC6 prepared English right angle L-bracket (ATS100-050 thru ATS100-100) |
| HDZ1M | Metric right angle L-bracket (ATS100-050 thru ATS100-100) |
| HDZ1M/VAC6 | VAC6 prepared metric right angle L-bracket (ATS100-050 thru ATS100-100) |
| HDZ1L | English right angle L-bracket (ATS100-150 thru ATS100-200) |
| HDZ1L/VAC6 | VAC6 prepared English right angle L-bracket (ATS100-150 thru ATS100-200) |
| HDZ1LM | Metric right angle L-bracket (ATS100-150 thru ATS100-200) |
| HDZ1LM/VAC6 | VAC6 prepared metric right angle L-bracket (ATS100-150 thru ATS100-200) |
| HALAR | High-accuracy system linear error correction for accuracy and repeatability |
| HALSF | High-accuracy system improved straightness and flatness |
*Please go HERE for complete information on XY, XZ and YZ assembly options.
*Please go HERE for complete information on motor orientation options.
