● 設(shè)計(jì)用于高性能的校準(zhǔn)和裝配應(yīng)用
● 0.5納米閉環(huán)分辨率
● 配合使用Automation 3200控制器分辨率可達(dá)62皮米
● 全預(yù)緊式空氣軸承
● 低噪聲線性放大器
● 完整的非接觸式設(shè)計(jì)
標(biāo)準(zhǔn)產(chǎn)品性能：
● 行程 ≤150 mm
● 定位精度 ±0.20 μm
● 重復(fù)定位精度 ±0.05 μm
● 直線度 ±0.25 μm
● 平面度 ±0.25 μm
直線平臺
The linear positioner is a fully preloaded, noncontact design. Inherently frictionless, air bearings have proven to be the standard in precision applications and Aerotech has now produced a miniature version. Driven by a noncontact linear brushless servomotor, this stage proves the ultimate solution whether the application requires small, accurate steps or constant smooth velocity. Superior magnetic field and motor coil design result in the highest force output of any miniature air-bearing stage, with superior servo performance. Years of research have resulted in a robust and perturbation-free cable management system.
反饋和控制系統(tǒng)
A wide selection of state-of-the-art motion controllers is available, including the Automation 3200 software-based controller with digital drives and the Soloist and Ensemble stand-alone controllers.
選項(xiàng)
Convenient rack or panel-mount amplifiers are included with all systems. Aerotech expert technical staff is experienced in custom system designs and will work with you to generate a system to meet the unique needs of your application.