AirLift115 空氣軸承升降平臺(tái) | 垂直運(yùn)動(dòng)平臺(tái) | AirLift115 Air-Bearing Lift Stage

Aerotech AirLift 115 series stages offer the ideal solution for applications that require very stringent Z direction positioning while maintaining extremely tight angular performance over full travel. Applications include semiconductor wafer inspection and testing, noncontact metrology, optical inspection systems and laser processing applications.