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您的位置：首頁 > 產(chǎn)品 > 高精密定位平臺 > 精密升降平臺和Z軸平臺 > AirLift115 空氣軸承升降平臺
AirLift115 空氣軸承升降平臺 | 垂直運(yùn)動平臺 | AirLift115 Air-Bearing Lift Stage
Aerotech AirLift 115 series stages offer the ideal solution for applications that require very stringent Z direction positioning while maintaining extremely tight angular performance over full travel. Applications include semiconductor wafer inspection and testing, noncontact metrology, optical inspection systems and laser processing applications.

Mechanical Specifications

Model AirLift 115-050 AirLift 115-100 AirLift 115-150
Travel 50 mm 100 mm 150 mm
Accuracy(1) Standard ±2.0 μm ±4.0 μm ±6.0 μm
HALAR ±1.0 μm ±1.25 μm ±1.5 μm
Resolution 0.05 μm
Bidirectional Repeatability(1) ±0.5 μm
Straightness(2) ±0.25 μm ±0.35 μm ±0.45 μm
Pitch(2) ±1 arc sec ±1.25 arc sec ±2 arc sec
Roll(2) ±1 arc sec ±1.25 arc sec ±2 arc sec
Yaw(2) ±1 arc sec ±1.25 arc sec ±2 arc sec
Maximum Speed 5 mm/rev 50 mm/s
Maximum Acceleration 0.25 g
Load Capacity(3) Vertical 15 kg
Operating Pressure 80 psi
Air Consumption ≤40 SLPM
Material Aluminum
MTBF (Mean Time Between Failure) 15,000 Hours
  1. Certified with each stage.
  2. Specifications are for centered load. Other loading configurations will affect specifications.
  3. Axis orientation for on-axis loading is listed.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  5. To protect air bearing against under-pressure condition, an in-line pressure switch tied to the motion controller is required.
  6. Air supply must be clean, dry to 0°F dewpoint, and filtered to 0.25 μm or better.

Electrical Specifications

Drive System Brushless Rotary Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage Up to 160 VDC
Limit Switches 5 V, Normally Closed

Recommended Controller

Multi-Axis A3200 Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
Ensemble Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis Soloist Soloist MP/Soloist CP/Soloist HLe
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.
  • AirLift115Spec

Dimensions

  • MT1
  • MT2

Ordering Information

Ordering Example

AirLift 115 -050 -LTX100 -BMS60-BRK -MT1

Ordering Options

Series Travel Options Encoder Motor Mounting
AirLift 115 -100
-150 		-LTX100 -BMS60-BRK
-BMS100-BRK 		-MT1
-MT2-050
-MT2-100
-MT2-150

AirLift 115 Air-Bearing Lift Stage

Option Description
AirLift 115 Screw-driven, air-bearing vertical stage

Travel Options

Option Description
-050 50 mm travel
-100 100 mm travel
-150 150 mm travel

Encoder

Option Description
-LTX100 Linear encoder for AirLift 115; 0.05 micron line-driver output

Motor

Option Description
-BMS60-BRK Brushless servomotor with connectors and brake
-BMS100-BRK Brushless servomotor with connectors and brake

Mounting

Option Description
-MT1 Mounting configuration 1; mounting surface perpendicular to axis motion
-MT2-050 Mounting configuration 2; mounting surface parallel to axis motion; for 50 mm travel stage
-MT2-100 Mounting configuration 2; mounting surface parallel to axis motion; for 100 mm travel stage
-MT2-150 Mounting configuration 2; mounting surface parallel to axis motion; for 150 mm travel stage