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Aerotech 的 ABRS 系列旋轉(zhuǎn)空氣軸承平臺(tái)提供卓越的角度定位，速度穩(wěn)定性和低運(yùn)動(dòng)誤差性能在一個(gè)非常低矮的封裝結(jié)構(gòu)中。ABRS旨在滿足晶片檢查，高精度計(jì)量，X射線衍射系統(tǒng)，光學(xué)檢查和制造，以及微機(jī)電系統(tǒng)/納米器件的制造等應(yīng)用的嚴(yán)苛要求。

ABRS Series Specifications

Model		ABRS-150MP	ABRS-200MP	ABRS-250MP	ABRS-300MP
Width		150 mm	200 mm	250 mm	300 mm
Tabletop Diameter		128.1 mm	178.1 mm	228.1 mm	278.1 mm
Height		80 mm	90 mm	100 mm	110 mm
Aperture		8 mm	20 mm	35 mm	75 mm
Travel		360° Continuous
Motor		S-50-39-A	S-76-35-A	S-130-39-A	S-180-44-A
Stall Torque, Continuous		0.20 N-m	0.53 N-m	2.36 N-m	5.99 N-m
Peak Torque		0.82 N-m	2.12 N-m	9.42 N-m	23.98 N-m
BEMF, Line-Line, Max		10.3 Vpk/Krpm	32.1 Vpk /Krpm	75.1 Vpk /Krpm	268.7 Vpk /Krpm
Continuous Current, Stall		2.4 Apk	2.0 Apk	3.8 Apk	2.7 Apk
		1.7 Arms	1.4 Arms	2.7 Arms	1.9 Arms
Torque Constant		0.09 N-m/Apk	0.26 N-m/Apk	0.62 N-m/Apk	2.22 N-m/Apk
		0.12 N-m/Arms	0.37 N-m/Arms	0.88 N-m/Arms	3.14 N-m/Arms
Bus Voltage		80 VDC
Resolution(1)		0.873 μrad (0.18 arc sec)	0.383 μrad (0.079 arc sec)	0.267 μrad (0.055 arc sec)	0.174 μrad (0.036 arc sec)
Fundamental Encoder Resolution		3600 lines/rev	8192 lines/rev	11,840 lines/rev	18,000 lines/rev
Max Speed(2)		300 rpm	300 rpm	500 rpm	500 rpm
Accuracy(3)		±3 arc sec	±2 arc sec
Bidirectional Repeatability		<2 arc sec	<1 arc sec
Max Load(4)	Axial	8 kg	31 kg	66 kg	97 kg
	Radial	4 kg	15 kg	36 kg	51 kg
	Tilt	3 N-m	10 N-m	28 N-m	45 N-m
Axial Error Motion (Synchronous)		<175 nm	<100 nm
Radial Error Motion (Synchronous)		<450 nm	<250 nm
Tilt Error Motion (Synchronous)		<9.7 μrad (<2.0 arc sec)	<3.4 μrad (<0.7 arc sec)	<2.4 μrad (<0.5 arc sec)	<2.4 μrad (<0.5 arc sec)
Axial Error Motion (Asynchronous)		<20 nm
Radial Error Motion (Asynchronous)		<20 nm
Tilt Error Motion (Asynchronous)		<0.4 μrad (<0.08 arc sec)	<0.3 μrad (<0.06 arcsec)	<0.2 μrad (<0.04 arc sec)	<0.2 μrad (<0.04 arc sec)
Operating Pressure(6)		80 psig (5.5 bar) + 0 psig (0.0 bar)/-10 psig (0.7 bar)
Air Consumption(7)		<56.6 SLPM (<2 SCFM)
Inertia	Unloaded	3850 kg-mm2	13,800 kg-mm2	39,100 kg-mm2	102,000 kg-mm2
Total Mass		4.8 kg	9.1 kg	15.6 kg	24.5 kg
Material		Aluminum
Finish		Hardcoat (62 Rockwell Hardness)

1. Maximum resolution presumes A3200 controller using MXH500 multiplication, and accounts for controller quadrature.
2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
3. Certified with each stage. Requires the use of an Aerotech controller.
4. Maximum loads are mutually exclusive.
5. All error motion specifications measured at 60 rpm.
6. To protect air bearing against under-pressure an in-line pressure switch tied to the motion controller is recommended.
7. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.

Dimensions

• ABRS-150MP
• ABRS-200MP
• ABRS-250MP
• ABRS-300MP

Ordering Information

Ordering Example

ABRS

-200MP

-M

-AS

Ordering Options

Series	Width (mm)	Mounting Pattern	Position Transducer
ABRS	-150MP -200MP -250MP -300MP	-M	-AS -X50

ABRS Series Direct-Drive, Air-Bearing Rotary Stage

Option	Description
ABRS-150MP	150 mm wide air-bearing rotary stage with 0.82 N-m peak torque output
ABRS-200MP	200 mm wide air-bearing rotary stage with 2.12 N-m peak torque output
ABRS-250MP	250 mm wide air-bearing rotary stage with 9.42 N-m peak torque output
ABRS-300MP	300 mm wide air-bearing rotary stage with 23.98 N-m peak torque output

Mounting Pattern

Option	Description
-M	Metric dimension mounting pattern and holes

Position Transducer

Option	Description
-AS	Standard feedback device, sine wave output; 3600 cycles per rev on ABRS-150MP; 8192 cycles per rev on ABRS-200MP; 11,840 cycles per rev on ABRS-250MP; 18,000 cycles per rev on ABRS-300MP
-X50	Square-wave digital output; 180,000 cycles per rev on ABRS-150MP; 409,600 cycles per rev on ABRS-200MP; 592,000 cycles per rev on ABRS-250MP; 900,000 cycles per rev on ABRS-300MP

Note: Digital output encoder signals are synthesized with a 16 MHz clock. Care must be taken to ensure that the encoder sample rate on the controller is 16 MHz or higher. Slower clock rates are available upon request.