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Aerotech 的 ARA1000 旋轉執(zhí)行器代表了顯著的突破性應用，如平板顯示器處理加工所要求的大型有效載荷的聯(lián)接方式。高負載慣量多軸系統(tǒng)可能遭受機械不穩(wěn)定，限制整機生產效率。ARA1000 通過特殊設計，顯著提高了平臺剛性，消除了這個問題。ARA1000轉臺采用了標準的57.2毫米通孔，它可以很容易地穿過真空線路。臺面包括一個標準的安裝模式，其允許非常容易地進行卡盤安裝。

ARA1000 Series Specifications

Model		ARA1000
Travel		100°
Bus Voltage		Up to 160 VDC
Motor		S-180-44-A
Continuous Current	Apk	2.7 A
	Arms	1.9 A
Accuracy(1)		±9.7 μrad (±2 arc sec)
Bidirectional Repeatability		±4.85 μrad (±1 arc sec)
Resolution(2)		0.058 μrad (0.012 arc sec)
Maximum Load (Axial)		45 kg
Maximum Speed(3)		60° per second
Rotating Inertia (Unloaded)		0.1203 kg-m2
Operating Pressure(4)		60 psig (4.137 bar) +0 psig (0 bar) -5 psig (-0.344 bar)
Vacuum Supply		21 "Hg ±2 "Hg
Air Consumption(5)		<56.6 SLPM (<2 SCFM)
Mass		17 kg
Finish	Tabletop	Hardcoat
	Stage	Black Anodize

1. Requires Aerotech controller for calibration and parts program implementation.
2. Based on Aerotech controls using 500X multiplication and controller quadrature. Higher resolutions available.
3. Maximum speed is load dependent. Maximum application velocity may be limited by system data rate and resolution.
4. To protect an air bearing against under pressure, an in-line pressure switch tied to the motion controller is recommended.
5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

• ARA1000

Ordering Information

Ordering Example

ARA1000

-NC

-REAS

Ordering Options

Series	Limits	Encoder
ARA1000	-NC -NO	-REAS

ARA1000 Rotary Actuator

Option	Description
ARA1000	Direct-drive rotary stage

Limits

Option	Description
-NC	Normally-closed end of travel limit switches (standard)
-NO	Normally-open end of travel limit switches

Encoder

Option	Description
-REAS	Rotary encoder 150 lines/degree; fundamental AS output