ARA1000空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái) | ARA1000 Air-Bearing Direct-Drive Rotary Stage | ARA1000精密氣浮轉(zhuǎn)臺(tái)
Aerotech 的 ARA1000 旋轉(zhuǎn)執(zhí)行器代表了顯著的突破性應(yīng)用，如平板顯示器處理加工所要求的大型有效載荷的聯(lián)接方式。高負(fù)載慣量多軸系統(tǒng)可能遭受機(jī)械不穩(wěn)定，限制整機(jī)生產(chǎn)效率。ARA1000 通過(guò)特殊設(shè)計(jì)，顯著提高了平臺(tái)剛性，消除了這個(gè)問(wèn)題。ARA1000轉(zhuǎn)臺(tái)采用了標(biāo)準(zhǔn)的57.2毫米通孔，它可以很容易地穿過(guò)真空線路。臺(tái)面包括一個(gè)標(biāo)準(zhǔn)的安裝模式，其允許非常容易地進(jìn)行卡盤安裝。
ARA1000 Series Specifications
| Model | ARA1000 | |
|---|---|---|
| Travel | 100° | |
| Bus Voltage | Up to 160 VDC | |
| Motor | S-180-44-A | |
| Continuous Current | Apk | 2.7 A |
| Arms | 1.9 A | |
| Accuracy(1) | ±9.7 μrad (±2 arc sec) | |
| Bidirectional Repeatability | ±4.85 μrad (±1 arc sec) | |
| Resolution(2) | 0.058 μrad (0.012 arc sec) | |
| Maximum Load (Axial) | 45 kg | |
| Maximum Speed(3) | 60° per second | |
| Rotating Inertia (Unloaded) | 0.1203 kg-m2 | |
| Operating Pressure(4) | 60 psig (4.137 bar) +0 psig (0 bar) -5 psig (-0.344 bar) | |
| Vacuum Supply | 21 "Hg ±2 "Hg | |
| Air Consumption(5) | <56.6 SLPM (<2 SCFM) | |
| Mass | 17 kg | |
| Finish | Tabletop | Hardcoat |
| Stage | Black Anodize | |
- Requires Aerotech controller for calibration and parts program implementation.
- Based on Aerotech controls using 500X multiplication and controller quadrature. Higher resolutions available.
- Maximum speed is load dependent. Maximum application velocity may be limited by system data rate and resolution.
- To protect an air bearing against under pressure, an in-line pressure switch tied to the motion controller is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
Dimensions
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ARA1000
Ordering Information
Ordering Example
| ARA1000 | -NC | -REAS |
Ordering Options
| Series | Limits | Encoder |
|---|---|---|
| ARA1000 |
-NC -NO |
-REAS |
ARA1000 Rotary Actuator
| Option | Description |
|---|---|
| ARA1000 | Direct-drive rotary stage |
Limits
| Option | Description |
|---|---|
| -NC | Normally-closed end of travel limit switches (standard) |
| -NO | Normally-open end of travel limit switches |
Encoder
| Option | Description |
|---|---|
| -REAS | Rotary encoder 150 lines/degree; fundamental AS output |