ABRT系列空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái) | ABRT Air-Bearing Direct-Drive Rotary Stage | ABRT精密氣浮轉(zhuǎn)臺(tái)
Aerotech的 ABRT 系列空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái)提供卓越的角度定位，速度穩(wěn)定性和無(wú)誤差運(yùn)動(dòng)性能，并且擁有令人印象深刻的有效負(fù)載能力及出色的軸向和徑向剛性。該ABRT精密轉(zhuǎn)臺(tái)是專為滿足DVD母盤(pán)，晶圓檢測(cè)，高精度測(cè)量應(yīng)用，X射線衍射系統(tǒng)，光學(xué)檢測(cè)和制造，以及微型機(jī)電系統(tǒng)(MEMS)/納米器件制造的嚴(yán)格要求。
ABRT Specifications
| Model | ABRT-150 | ABRT-200 | ABRT-260 | |
|---|---|---|---|---|
| Width | 146 mm | 196 mm | 260 mm | |
| Tabletop Diameter | 100 mm | 145 mm | 200 mm | |
| Height | 135 mm | 165 mm | 185 mm | |
| Aperture | 20 mm | 30 mm | 50 mm | |
| Travel | 360° Continuous | |||
| Motor | Direct-Drive Brushless Servomotor | |||
| Stall Torque, Continuous | 0.36 N-m | 3.7 N-m | 6.7 N-m | |
| Peak Torque | 1.4 N-m | 14.6 N-m | 26.6 N-m | |
| BEMF, Line-Line, Max | 10.9 Vpk/krpm | 163.6 Vpk/krpm | 129.8 Vpk/krpm | |
| Continuous Current, Stall | 3.8 Apk | 2.7 Apk | 6.2 Apk | |
| 2.7 Arms | 1.9 Arms | 4.4 Arms | ||
| Torque Constant | 0.09 N-m/Apk | 1.35 N-m/Apk | 1.07 N-m/Apk | |
| 0.13 N-m/Arms | 1.91 N-m/Arms | 1.52 N-m/Arms | ||
| Bus Voltage | Up to 320 VDC | |||
| Resolution(1) | 0.267 μrad (0.055 arc sec) | 0.174 μrad (0.036 arc sec) | 0.133 μrad (0.027 arc sec) | |
| Fundamental Encoder Resolution | 11,840 lines/rev | 18,000 lines/rev | 23,600 lines/rev | |
| Max Speed(2) | 1200 rpm | 800 rpm | 600 rpm | |
| Accuracy(3) | ±2 arc sec | |||
| Repeatability | <1 arc sec | |||
| Max Load(4) | Axial | 20 kg | 41 kg | 69 kg |
| Radial | 3 kg | 6 kg | 10 kg | |
| Tilt | 3.5 Nm | 8 Nm | 18 Nm | |
| Axial Error Motion (Synchronous) | <100 nm | |||
| Radial Error Motion (Synchronous) | <150 nm | |||
| Tilt Error Motion (Synchronous) | <2.4 μrad (<0.5 arc sec) | |||
| Axial Error Motion (Asynchronous) | <20 nm | |||
| Radial Error Motion (Asynchronous) | <20 nm | |||
| Tilt Error Motion (Asynchronous) | <0.2 μrad (<0.04 arc sec) | |||
| Operating Pressure(6) | 80 psig (5.5 bar) ±5 psig (0.3 bar) | |||
| Air Consumption(7) | <56.6 SLPM (<2 SCFM) | |||
| Inertia | Unloaded | 2300 kg?mm2 | 13,500 kg?mm2 | 46,400 kg?mm2 |
| Total Mass | 6.7 kg | 14.7 kg | 27.1 kg | |
| Material | Aluminum | |||
| Finish | Hardcoat (62 Rockwell Hardness) | |||
- Maximum resolution presumes A3200 controller using MXH500 multiplication, and accounts for controller quadrature.
- Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
- Certified with each stage. Requires the use of an Aerotech controller.
- Maximum loads are mutually exclusive.
- All error motion specifications measured at 60 rpm.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.
Dimensions
-
ABRT-150
-
ABRT-200
-
ABRT-260
Ordering Information
Ordering Example
| ABRT | -200 | -AS |
Ordering Options
| Series | Width (mm) | Position Transducer |
|---|---|---|
| ABRT |
-150 -200 -260 |
-AS -X50 |
ABRT Series Direct-Drive, Air-Bearing Rotary Stage
| Option | Description |
|---|---|
| ABRT-150 | 150 mm wide air-bearing rotary stage with 0.36 N-m continuous torque output |
| ABRT-200 | 200 mm wide air-bearing rotary stage with 3.7 N-m continuous torque output |
| ABRT-260 | 260 mm wide air-bearing rotary stage with 6.7 N-m continuous torque output |
Position Transducer
| Option | Description |
|---|---|
| -AS | Standard feedback device, sine wave output; 11,840 cycles per rev on ABRT-150; 18,000 cycles per rev on ABRT-200; and 23,600 cycles per rev on ABRT-260 |
| -X50 | Square-wave digital output; 592,000 cycles per rev on ABRT-150; 900,000 cycles per rev on ABRT-200; and 1,180,000 cycles per rev on ABRT-260 |
-
Note: Digital output encoder signals are synthesized with a 40 MHz clock. Care must be taken to ensure that the encoder sample rate on the controller is 40 MHz or higher. Slower clock rates are available upon request.