ANT95-R 單軸直驅(qū)納米定位轉(zhuǎn)臺(tái) | ANT95-R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages
ANT95-R和ANT95-R-PLUS直驅(qū)轉(zhuǎn)臺(tái)被設(shè)計(jì)成Aerotech納米運(yùn)動(dòng)科技產(chǎn)品家族的一部分。我們的轉(zhuǎn)臺(tái)提供了史無(wú)前例的定位穩(wěn)定性（0.005角秒）和0.01角秒的增量運(yùn)動(dòng)性能，并提供兩種等級(jí)的精度。
ANT95-R Series Specifications
| Model |
ANT95- 20-R |
ANT95- 20-R-PLUS |
ANT95- 180-R |
ANT95- 180-R-PLUS |
ANT95- 360-R |
ANT95- 360-R-PLUS |
|
|---|---|---|---|---|---|---|---|
| Rotation Angle | 20° | 20° | 180° | 180° | ±360° Continuous | ±360° Continuous | |
| Accuracy(1) | 10 arc sec | 3 arc sec | 10 arc sec | 3 arc sec | 10 arc sec | 3 arc sec | |
| Resolution | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | |
| Bidirectional Repeatability(1) | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | |
| Unidirectional Repeatability | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | |
| Tilt Error Motion | Synchronous | N/A | N/A | N/A | N/A | 10 arc sec | 10 arc sec |
| Asynchronous | N/A | N/A | N/A | N/A | 3 arc sec | 3 arc sec | |
| Axial Error Motion(1) | Synchronous | N/A | N/A | N/A | N/A | 2 μm | 2 μm |
| Asynchronous | N/A | N/A | N/A | N/A | 0.5 μm | 0.5 μm | |
| Radial Error Motion(1) | Synchronous | N/A | N/A | N/A | N/A | 3 μm | 3 μm |
| Asynchronous | N/A | N/A | N/A | N/A | 1 μm | 1 μm | |
| Maximum Speed | 20 rpm | 20 rpm | 20 rpm | 20 rpm | 200 rpm | 200 rpm | |
| Maximum Acceleration | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | |
| In-Position Stability(2) | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | |
| Aperture | 11 mm | 11 mm | 11 mm | 11 mm | 11 mm | 11 mm | |
| Maximum Torque (Continuous) | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | |
| Load Capacity(3) | Axial | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg |
| Radial | 1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg | |
| Moment | 2 N-m | 2 N-m | 2 N-m | 2 N-m | 2 N-m | 2 N-m | |
| Rotor Inertia (Unloaded) | 0.00065 kg-m2 | 0.00065 kg-m2 | 0.00066 kg-m2 | 0.00066 kg-m2 | 0.00069 kg-m2 | 0.00069 kg-m2 | |
| Stage Mass | 1.2 kg | 1.2 kg | 1.2 kg | 1.2 kg | 1.2 kg | 1.2 kg | |
| Material | Aluminum Body/Black Hardcoat Finish | ||||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||||||
- Certified with each stage. Requires the use of an Aerotech controller.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- All error motion specifications are measured at 60 rpm.
- For high-speed operation customer payload must be balanced to G1.0 per ISO 1940.
Electrical Specifications
| Drive System | Slotless, Brushless, Direct-Drive Rotary Motor |
| Feedback | Noncontact Rotary Encoder |
| Maximum Bus Voltage | ±40 VDC |
| Limit Switches | 5 V, Normally Closed |
| Home Switch | Near Center |
Recommended Controller
| Multi-Axis | A3200 |
Npaq MXR Npaq MR-MXH Ndrive ML-MXH |
| Ensemble |
Epaq MXR Epaq MR-MXH Ensemble ML-MXH |
|
| Single Axis | Soloist | Soloist ML-MXH |
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25oC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.
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ANT95-R Step Plot
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ANT95-R Specifications Images
Dimensions
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ANT95-R/ANT95-R-PLUS
Ordering Information
ANT95-R Series Rotary Stage
| Option | Description |
|---|---|
| ANT95-R |
Aerotech direct-drive rotary positioner |
Rotary Stage Travel
| Option | Description |
|---|---|
| ANT95-20-R | 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops |
| ANT95-20-R-PLUS | 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version) |
| ANT95-180-R | 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops |
| ANT95-180-R-PLUS | 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version) |
| ANT95-360-R | 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits |
| ANT95-360-R-PLUS | 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits (high accuracy version) |
Options
| Option | Description |
|---|---|
| -MP | Breadboard mounting plate |