WaferMax T機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái) | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage
Aerotech的 WaferMax T 轉(zhuǎn)臺(tái)是需要低高度封裝結(jié)構(gòu)提供高性能應(yīng)用的理想選擇。最初設(shè)計(jì)用于滿足精密晶片檢測(cè)的需求，WaferMax T已經(jīng)被應(yīng)用到多種應(yīng)用。需要有限旋轉(zhuǎn)時(shí)，標(biāo)準(zhǔn)25毫米孔徑允許真空線容易直通穿過。如果連續(xù)旋轉(zhuǎn)是必要的，可選的單或雙端口旋轉(zhuǎn)接頭可以合并。臺(tái)面包括一個(gè)標(biāo)準(zhǔn)的安裝模式，其允許晶片易于卡盤安裝。
WaferMax T Specifications
| Model | WaferMax T | |
|---|---|---|
| Travel | 360 degrees, continuous | |
| Tabletop Diameter | 106.7 mm | |
| Drive System | Direct-drive brushless servomotor | |
| Maximum Bus Voltage | up to 340 VDC | |
| Maximum Torque (Continuous) | 5.99 N?m | |
| Encoder | 2048 lines/rev fundamental; 10000 lines/rev fundamental | |
| Accuracy(1) | HALAR | ±25 μrad (±5 arc sec) |
| Bidirectional Repeatability | ±10 μrad (±2 arc sec) | |
| Tilt Error Motion | 97 μrad (20 arc sec) | |
| Axial Error Motion | 5 μm | |
| Radial Error Motion | 5 μm | |
| Maximum Speed | 400 rpm (unloaded) | |
| Maximum Load(2) | Axial | 40 kg |
| Radial | 20 kg | |
| Inertia | 0.008130 kg?m2 | |
| Mass | 7.0 kg | |
| Material | Aluminum | |
| Finish | Black Anodize | |
- Available with Aerotech controllers.
- Maximum loads are mutually exclusive.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
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Axial and Radial Cantilevered Load Capability (WaferMax T)
Dimensions
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WaferMax T
Ordering Information
Ordering Example
| WaferMax T | -RE2048AS | -RU |
Ordering Options
| Series | Encoder | Options |
|---|---|---|
| WaferMax T |
-RE2048AS -RE10000AS |
-RU1 -RU2 -GRND |
WaferMax T Direct-Drive Rotary Stage
| Option | Description |
|---|---|
| WaferMax T | Direct-drive rotary stage with 25 mm clear aperture |
Encoder
| Option | Description |
|---|---|
| -RE2048AS | Rotary encoder 2048 lines/rev; fundamental AS output |
| -RE10000AS | Rotary encoder 10000 lines/rev; fundamental AS output |
Options
| Option | Description |
|---|---|
| -RU1 | Rotary union for feed-through of air/vacuum, single port |
| -RU2 | Rotary union for feed-through of air/vacuum, dual port |
| -GRND | Adds grounding connection from tabletop |