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運(yùn)動(dòng)控制系統(tǒng)驅(qū)動(dòng)器電機(jī)執(zhí)行器|電動(dòng)推桿|電動(dòng)缸直線運(yùn)動(dòng)系統(tǒng)高精密定位平臺(tái)精密轉(zhuǎn)臺(tái)ABRT-400空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái)ABRS系列空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái)ARA1000空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái)ABRT系列空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái)ADRH機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ASR1000機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ASR1100機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ASR1200機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)CCS 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ACS 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ACS LP 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ANT95-R 單軸直驅(qū)納米定位轉(zhuǎn)臺(tái)ANT130-R 單軸直驅(qū)納米定位轉(zhuǎn)臺(tái)ADRS 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ADRT 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)APR 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ASRT 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ARMS 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)ALAR 機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)WaferMax T機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺(tái)AXR 雙軸精密轉(zhuǎn)臺(tái)組件MPS-GR 機(jī)械軸承蝸輪蝸桿轉(zhuǎn)臺(tái)AGR 機(jī)械軸承蝸輪蝸桿轉(zhuǎn)臺(tái)精密直線定位平臺(tái)精密 X-Y 直線定位平臺(tái)精密升降平臺(tái)和Z軸平臺(tái)陶瓷電機(jī)驅(qū)動(dòng)納米定位平臺(tái)行星減速機(jī)直線軸承和直線導(dǎo)軌滾珠絲杠和梯形絲杠精密滾珠測(cè)量反饋裝置精密電主軸機(jī)器人關(guān)節(jié)模組
AGR 機(jī)械軸承蝸輪蝸桿轉(zhuǎn)臺(tái) | AGR Mechanical-Bearing Gear-Drive Rotary Stage | 精密轉(zhuǎn)臺(tái)

AGR系列電動(dòng)轉(zhuǎn)臺(tái)在速度、負(fù)載能力和長(zhǎng)期定位性能方面比前幾代蝸輪驅(qū)動(dòng)轉(zhuǎn)臺(tái)獲得了顯著改進(jìn)。 AGE系列平臺(tái)滿足廣泛的實(shí)驗(yàn)室和工業(yè)用途的通用定位應(yīng)用。

AGR Specifications

Mechanical Specifications AGR50 AGR75 AGR100 AGR150 AGR200
Travel 360° (Limited Travel Versions Available)
Accuracy(1) Standard 0.87 mrad (180 arc sec) 0.58 mrad (120 arc sec)
Standard (HALAR) 0.29 mrad (60 arc sec) 0.24 mrad (50 arc sec)
Direct Encoder 97 μrad (20 arc sec)
Direct Encoder (HALAR) 58 μrad (12 arc sec) 49 μrad (10 arc sec)
Repeatability
(Unidirectional)(1) 		Standard 49 μrad (10 arc sec)
Direct Encoder 24 μrad (5 arc sec)
Repeatability
(Bi-directional)(1) 		Standard 0.22 mrad (45 arc sec)
Direct Encoder 39 μrad (8 arc sec) 29 μrad (6 arc sec)
Tilt Error Motion 49 μrad (10 arc sec)
Axial Error Motion 5 μm
Radial Error Motion 10 μm
Gear Ratio 51:1 67:1 85:1 117:1 126:1
Maximum Speed(2) BM/BMS 180°/s 120°/s
SM 60°/s 40°/s
Maximum Acceleration(3) 720°/s2 480°/s2
Aperture 50 mm 75 mm 100 mm 150 mm 200 mm
Load Capacity Axial 40 kg 100 kg 200 kg 300 kg 425 kg
Radial 20 kg 50 kg 100 kg 125 kg 200 kg
Moment See Moment Load Curves
Maximum Torque Load to Stage Shaft 2.5 N?m 3.5 N?m 12 N?m 20 N?m 80 N?m
Rotor Inertia (Unloaded) 0.00052 kg?m2 0.0013 kg?m2 0.0035 kg?m2 0.011 kg?m2 0.076 kg?m2

Stage Mass
(No Motor)

Standard 1.9 kg 2.4 kg 4.5 kg 6.1 kg 18.6 kg
Direct Encoder 2.5 kg 3.1 kg 5.6 kg 7.6 kg 21.7 kg
Material Aluminum
  1. Certified with each stage.
  2. Maximum speed is load dependent. Contact an Aerotech Application Engineer if imbalanced loads are present.
  3. Unloaded acceleration.
  4. On-axis loading is listed.
  5. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Model AGR50 AGR75 AGR100 AGR150 AGR200
Drive System Precision Worm-Gear with Brushless or Stepping Motor
Feedback Standard Rotary Motor Feedback: 2000 Lines/Rev Square Wave (BM Motor); 2000 Lines/Rev Square Wave and 1000 Lines/Rev Amplified Sine (BMS Motor) Rotary Motor Feedback: 2500 Lines/Rev Square Wave and 1000 Lines/Rev Amplified Sine
Direct Encoder Noncontact Rotary Encoder Directly Mounted to AGR Stage Shaft
15744 Lines/Rev 18000 Lines/Rev 23600 Lines/Rev 31488 Lines/Rev 40000 Lines/Rev
Maximum Bus Voltage BM 80 VDC 320 VDC
BMS 320 VDC
SM(1) 40 VDC 80 VDC
Limit Switches 5 V, Normally Closed or Normally Open
Home Switch Near Limit (for Limited Travel Stage Version)
  1. For SM motors with Aerotech controllers, amplifier bus voltages are 2X values listed.

Recommended Controller

Multi-Axis A3200 Ndrive MP10/Ndrive CP10/Npaq
Ensemble Ensemble MP10/Ensemble CP10/Epaq
Single Axis Soloist Soloist MP10/Soloist CP10
  • AGR Specifications Graph

Dimensions

  • AGR50
  • AGR50 Accessories
  • AGR75
  • AGR75 Accessories
  • AGR100
  • AGR100 Accessories
  • AGR150
  • AGR150 Accessories
  • AGR200
  • AGR200 Accessories

Ordering Information

Ordering Example

AGR100 -LI5 -NO-9DU -BMS -R -3 -SL -AS -TTM -PLOTS

Ordering Options

Stage/
Aperture 		Limited Travel(Optional) Limits Motor *Motor Location Motor Orientation Seals(Optional) Direct Encoder Option(Optional) Accessories(Optional) Metrology(Optional)
AGR50
AGR75
AGR100
AGR150
AGR200 		-LIXXX -NC-9DU
-NO-9DU
-NC-FLY
-NO-FLY 		-NM
-SM
-BMS
-BMS-BK
-BM
-BM-BK
-BMS-AS
-BMS-AS-BK
-BM-AS
-BM-AS-BK 		-R
-L 		-0
-2
-3
-4
-5 		-SL -AS
-X5
-X50 		-TTM
-TTU
-MP 		-PLOTS
-NO PLOTS
    *NOTE: Motor mounting on right side of stage is standard. See CAD drawings.

Stage/Aperture

Option Description
AGR50 50 mm diameter clear aperture
AGR75 75 mm diameter clear aperture
AGR100 100 mm diameter clear aperture
AGR150 150 mm diameter clear aperture
AGR200 200 mm diameter clear aperture

Limited Travel Options

Option Description
-LIXXX XXX degrees of nominal limit travel (plus 2 degrees of overtravel per side) where XXX = 015 to 270 in 15 deg increments and 315 degrees
    Note: Standard options include unlimited travel as well as limited travels listed above.

Limit Options

Option Description
-NC-9DU Normally-closed end of travel limit switches w/9-pin connector
-NO-9DU Normally-open end of travel limit switches w/9-pin connector
-NC-FLY Normally-closed end of travel limit switches w/flying leads
-NO-FLY Normally-open end of travel limit switches w/flying leads

Motor

Option Description
-NM No motor or encoder
-SM Stepping motor; AGR50/75 (NEMA17 stepping motor); AGR100/150 (50SMB2-HM); AGR200 (310SMB3-HM)
-BMS Brushless, slotless servomotor with connectors and TTL encoder (requires motor-to-controller cable); AGR50/75 (BMS35-A-D25-E2000H); AGR100/150 (BMS60-A-D25-E2500H); AGR200 (BMS280-A-MS-E2500H)
-BMS-BK Brushless, slotless servomotor with connectors, TTL encoder, and fail-safe brake (requires motor-to-controller cable); AGR50/75 (BMS35-A-D25-E2000H-BK); AGR100/150 (BMS60-A-D25-E2500H-BK1); and AGR200 (BMS280-A-MS-E2500H-BK2)
-BM Brushless servomotor with connectors and TTL encoder (requires motor-to-controller cable); AGR50/75 (BM22-D25-E2000H); AGR100/150 (BM75-D25-E2500H); AGR200 (BM250-MS-E2500H)
-BM-BK Brushless servomotor with connectors, TTL encoder, and fail-safe brake (requires motor-to-controller cable); AGR50/75 (BM22-D25-E2000H-BK); AGR100/150 (BM75-D25-E2500H-BK1); AGR200 (BM250-MS-E2500H-BK2)
-BMS-AS Brushless, slotless servomotor with 1000-line amplified sine encoder; AGR50/75 (BMS35-A-D25-E1000ASH); AGR100/150 (BMS60-A-D25-E1000ASH); AGR200 (BMS280-AH-MS-E1000ASH)
-BMS-AS-BK Brushless, slotless servomotor with fail-safe brake and 1000-line amplified sine encoder; AGR50/75 (BMS35-A-D25-E1000ASH-BK); AGR100/150 (BMS60-A-D25-E1000ASH-BK1); AGR200 (BMS280-AH-MS-E1000ASH-BK2)
-BM-AS Brushless servomotor with 1000-line amplified sine encoder; AGR50/75 option not available; AGR100/150 (BM75-D25-E1000ASH); AGR200 (BM250-MS-E1000ASH)
-BM-AS-BK Brushless servomotor with fail-safe brake and 1000-line amplified sine encoder; AGR50/75 option not available; AGR100/150 (BM75-D25-E1000ASH-BK1); AGR200
(BM250-MS-E1000ASH-BK2)

Motor Location (Note: Motor mounting on right side [-R] is standard)

Option Description
-R Motor located on right side of stage housing (standard)
-L Motor located on left side of stage housing (optional)

Motor Orientation (see Motor Orientation illustration below)

Option Description
-0 No motor option
-2 Motor orientation 2
-3 Motor orientation 3 (standard)
-4 Motor orientation 4
-5 Motor orientation 5

AGR-MOTOR-ORIENT-CAT

Seals (Optional)

Option Description
-SL Labyrinth seal kit

Direct Encoder Option (Optional)

Option Description
-AS Amplfied sine output encoder (see Electrical Specifications for fundamental resolution)
-X5 Square wave TTL output; X5 multiplication
-X50 Square wave TTL output; X50 multiplication

Accessories (Optional)

Option Description
-TTM Metric tabletop
-TTU English tabletop
-MP Universal English/Metric mounting plate

Metrology (Required)

Option Description
-PLOTS Accuracy and repeatability performance plots
-NO PLOTS No performance plots