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ABL2000空氣軸承直驅(qū)直線平臺 | ABL2000 Air-Bearing Direct-Drive Linear Stage | 氣浮直線電機(jī)平臺
ABL2000空氣軸承平臺結(jié)合了優(yōu)秀的俯仰/偏轉(zhuǎn)特性和打印、成像、半導(dǎo)體和光子應(yīng)用所必需的無與倫比的速度控制。

ABL2000 Specifications

Model ABL20010 ABL20020 ABL20030 ABL20040
Travel 100 mm 200 mm 300 mm 400 mm
Accuracy LT HALAR(1) ±0.5 μm ±0.75 μm
Standard ±4.0 μm ±8.0 μm ±11.5 μm ±14.0 μm
LN HALAR(1) ±0.5 μm ±0.75 μm
Standard ±5.0 μm
Laser Interferometer Standard ±10 ppm; Compensated ±1.5 ppm(2)
LZAS ±0.2 μm over entire travel N/A N/A
Repeatability LT ±0.2 μm ±0.3 μm
LN ±0.2 μm ±0.3 μm
LZAS ±0.1 μm N/A N/A
Straightness and Flatness Maximum Deviation ±0.25 μm ±0.40 μm ±0.75 μm ±1.5 μm
Pitch/Roll/Yaw 1 arc sec 2 arc sec 3 arc sec 4 arc sec
Maximum Speed(3) 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Load(4) 50.0 kg
Operating Pressure(5) 80 psi ±5 psi
Air Consumption(6) 19.8 SLPM (0.7 SCFM) (Single Axis)
Moving Mass 9 kg
Nominal Stage Mass 30.0 kg 34.5 kg 39.5 kg 44.0 kg
Material Aluminum
Finish Hard Coating (62 Rockwell Hardness)
  1. Available with Aerotech controllers.
  2. Requires environmental compensation.
  3. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
  4. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
  5. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  6. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
  7. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  8. When mounting the ABL2000 in an XY configuration the maximum upper axis length is 300 mm.
Model ABL20050 ABL20075 ABL20100 ABL20120
Travel 500 mm 750 mm 1000 mm 1200 mm
Accuracy LT HALAR(1) ±0.75 μm ±1 μm
Standard ±15.75 μm ±18.5 μm ±20.0 μm ±21.0 μm
LN HALAR(1) ±0.75 μm ±1 μm
Standard ±5.0 μm
Laser Interferometer Standard ±10 ppm; Compensated ±1.5 ppm(2)
Repeatability LT ±0.3 μm ±0.4 μm
LN ±0.3 μm ±0.4 μm
Straightness and Flatness Maximum Deviation ±2.0 μm ±3.0 μm ±4.0 μm ±5.0 μm
Pitch/Roll/Yaw 5 arc sec 7.5 arc sec 10 arc sec 12 arc sec
Maximum Speed(3) 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Load(4) 50.0 kg
Operating Pressure(5) 80 psi ±5 psi
Air Consumption(6) 19.8 SLPM (0.7 SCFM) (Single Axis)
Moving Mass 9 kg
Nominal Stage Mass 49.0 kg 61.0 kg 72.5 kg 79.5 kg
Material Aluminum
Finish Hard Coating (62 Rockwell Hardness)
  1. Available with Aerotech controllers.
  2. Requires environmental compensation.
  3. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
  4. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
  5. To protect air bearing against under-pressure an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  6. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
  7. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  8. When mounting the ABL2000 in an XY configuration the maximum upper axis length is 300 mm.
  • ABL2000
  • ABL2000spec-2

Dimensions

  • ABL2000

Ordering Information

Ordering Example

ABL20 100 -10 -RIBBON -LN100AS -NC -

Ordering Options

Series Travel (mm) Motor Cabling Linear Encoder Limits Options
ABL20 010
020
030
040
050
075
100
120 		-10 -RIBBON
-ROUND 		-LTnnAS
-LTnnX5
-LNnnAS
-LZASnn
-LZR 		-NC -XY-CMS
-HALAR

ABL2000 Series Linear Air-Bearing Stage

Option Description
ABL20010 100 mm (4 in) travel linear air-bearing stage with linear motor and limits
ABL20020 200 mm (8 in) travel linear air-bearing stage with linear motor and limits
ABL20030 300 mm (12 in) travel linear air-bearing stage with linear motor and limits
ABL20040 400 mm (16 in) travel linear air-bearing stage with linear motor and limits
ABL20050 500 mm (20 in) travel linear air-bearing stage with linear motor and limits
ABL20075 750 mm (30 in) travel linear air-bearing stage with linear motor and limits
ABL20100 1000 mm (40 in) travel linear air-bearing stage with linear motor and limits
ABL20120 1200 mm (48 in) travel linear air-bearing stage with linear motor and limits

Motor

Option Description
-10 Brushless linear motor (BLMC-192-A)

Cabling

Option Description
-RIBBON Flat ribbon cabling
-ROUND E-chain and round wire cabling

Standard Linear Encoders

Option Description
-LT10AS Linear encoder for ABL20010; amplified sine output
-LT20AS Linear encoder for ABL20020; amplified sine output
-LT30AS Linear encoder for ABL20030; amplified sine output
-LT40AS Linear encoder for ABL20040; amplified sine output
-LT50AS Linear encoder for ABL20050; amplified sine output
-LT75AS Linear encoder for ABL20075; amplified sine output
-LT100AS Linear encoder for ABL20100; amplified sine output
-LT120AS Linear encoder for ABL20120; amplified sine output
-LT10X5 Linear encoder for ABL20010; 1.0 micron line driver output
-LT20X5 Linear encoder for ABL20020; 1.0 micron line driver output
-LT30X5 Linear encoder for ABL20030; 1.0 micron line driver output
-LT40X5 Linear encoder for ABL20040; 1.0 micron line driver output
-LT50X5 Linear encoder for ABL20050; 1.0 micron line driver output
-LT75X5 Linear encoder for ABL20075; 1.0 micron line driver output
-LT100X5 Linear encoder for ABL20100; 1.0 micron line driver output
-LT120X5 Linear encoder for ABL20120; 1.0 micron line driver output

High-Accuracy Linear Encoders

Option Description
-LN10AS High-accuracy linear encoder for ABL20010; amplified sine output
-LN20AS High-accuracy linear encoder for ABL20020; amplified sine output
-LN30AS High-accuracy linear encoder for ABL20030; amplified sine output
-LN40AS High-accuracy linear encoder for ABL20040; amplified sine output
-LN50AS High-accuracy linear encoder for ABL20050; amplified sine output
-LN75AS High-accuracy linear encoder for ABL20075; amplified sine output
-LN100AS High-accuracy linear encoder for ABL20100; amplified sine output
-LN120AS High-accuracy linear encoder for ABL20120; amplified sine output

High-Accuracy/High-Resolution Linear Encoders

Option Description
-LZAS10 High-accuracy/high-resolution linear encoder for ABL20010; amplified sine output
-LZAS20 High-accuracy/high-resolution linear encoder for ABL20020; amplified sine output

Note: Maximum travel for this option is 200 mm.

Laser Interferometer Feedback Option

Option Description
-LZR Laser interferometer feedback, amplified sine output

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches

Options

Option Description
-XY-CMS Cable management system for X-Y assembly; order with X-axis only