● 精密研磨滾珠絲杠或絲杠
● 直流或步進電機可選
● 高真空能力
● 精密交叉滾柱軸承
● 可與MPS直線和旋轉平臺構成多軸配置
High-Accuracy Construction
All MPS-SV stages feature a precision-ground ball screw and preloaded crossed-roller bearings providing smooth and accurate geometric performance, exceptional accuracy and repeatability, and 0.05 μm minimum incremental motion capabilities. The MPS50SV is also offered with a lead-screw drive option for more cost-sensitive applications.
MPS-SV motor options include a DC servomotor with rotary encoder and a stepper motor. A precision-machined wedge design and lateral constraint system provide high stiffness and load capacity while at the same time providing proper constraint of lateral motions.
Vacuum and Mounting Options
As with all MPS-series stages, the MPS-SV stages are available in an optional vacuum preparation to 10-6 Torr that includes a vacuum-rated connector. An optional mounting plate provides direct mounting to both English and metric optical breadboard tables. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.