ANT95-3-V 納米定位升降平臺 | 機(jī)械軸承直線電機(jī)直驅(qū)納米定位垂直升降平臺 | ANT95-3-V Single-Axis Lift Direct-Drive Nanopositioning Stage | ANT95-3-V Series Mechanical Bearing, Linear Motor Vertical Lift Stage
Aerotech ANT series stages are the world first nanometer-level positioning systems with multi-millimeter travel. The ANT95-V and ANT95-V-PLUS are linear-motor-driven wedge-style vertical lift stages. The stages are designed to be seamlessly integrated with other stages in the ANT95 family for superior multi-axis performance and are offered in two accuracy grades.
| Model | ANT95-3-V | ANT95-3-V-PLUS |
|---|---|---|
| Travel | 3 mm | |
| Accuracy(1) | ±2 μm | ±200 nm |
| Resolution | 1 nm | |
| Bidirectional Repeatability(1) | ±150 nm | ±100 nm |
| Unidirectional Repeatability | ±75 nm | |
| Straightness(2) | ±1.0 μm | |
| Pitch(1) | 20 arc sec | |
| Roll(1) | 10 arc sec | |
| Yaw(1) | 10 arc sec | |
| Maximum Speed | 75 mm/s | |
| Maximum Acceleration | 0.4 g (No Load) | |
| Settling Time | See graphs for typical performance | |
| In-Position Stability(3) | <1 nm | |
| Maximum Force (Continuous) | 71 N | |
| Load Capacity(4) | 1.5 kg | |
| Moving Mass | 1.1 kg | |
| Stage Mass | 2.0 kg | |
| Material | Aluminum and Stainless-Steel Body/Black Hardcoat Finish/Black Anodize Finish | |
| MTBF (Mean Time Between Failure) | 30,000 Hours | |
- Certified with each stage.
- Measured perpendicular or parallel to wedge direction.
- In-Position Stability listing is 3 sigma value.
- Assumes loading along axis of travel.
- Specifications are per axis measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
Electrical Specifications
| Drive System | Brushless Linear Servomotor |
| Feedback | Noncontact Linear Encoder |
| Maximum Bus Voltage | ±40 VDC |
| Limit Switches | 5 V, Normally Closed |
| Home Switch | Near Center |
Recommended Controller
| Multi-Axis | A3200 | Npaq MXR |
| Npaq MR-MXH | ||
| Ndrive ML-MXH | ||
| Ensemble | Epaq MXH | |
| Epaq MR-MXH | ||
| Ensemble ML-MXH | ||
| Single Axis | Soloist | Soloist ML-MXH |
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
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ANT95-3-V-Plus Step Plot
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ANT95-3-V Performance Graphs
Dimensions
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ANT95-3-V
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Mounting Plate
Ordering Information
ANT95-V Series Lift Stage
| Option | Description |
|---|---|
| ANT95-V/ANT95-V-PLUS | Aerotech nanotranslation crossed-roller bearing vertical lift positioner |
Linear Stage Travel
| Option | Description |
|---|---|
| ANT95-3-V | 3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vppsinusoidal output linear encoder and limits |
| ANT95-3-V-PLUS | 3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vppsinusoidal output linear encoder and limits (High Accuracy Version) |
Options
| Option | Description |
|---|---|
| -MP | Breadboard mounting plate |