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The WaferMax Z represents a significant breakthrough in vertical alignment of high-precision components in one compact package. Its superior noncontact linear motor drive employs a high-accuracy encoder for direct position feedback. When combined with Aerotech’s MXH multiplier, it offers 0.83 nm resolution in addition to high speed and accuracy.

WaferMax Z Specifications

Model		WaferMax Z
Travel		5 mm
Motor Type		Direct-drive brushless linear servomotor
Bus Voltage		up to 160 VDC
Continuous Current	Apk	2.9 A
	Arms	2.1 A
Encoder		20 μm fundamental; amplified sine output
Resolution		0.83 nm
Accuracy(1,3)		±1.5 μm
Bidirectional Repeatability(3)		±0.3 μm
Straightness(4)		±2 μm
Roll		20 arc sec
Pitch		20 arc sec
Yaw		20 arc sec
Maximum Speed		4 mm/s
Maximum Load(5)		10 kg (requires use of integral pneumatic counterbalance)
Moving Mass		1.0 kg
Wedge Ratio		12:1
Stage Mass		4.2 kg
Material		Aluminum
Finish		Black anodize hard cover; Hard coat (62 Rockwell Hardness) tabletop

1. Requires Aerotech controller.
2. For inverted operation, consult factory.
3. Certified with each stage.
4. Measured perpendicular or parallel to wedge direction.
5. Higher maximum loads possible. Contact factory for details.
6. Specifications are per axis measured 25 mm above the tabletop without a payload. Performance is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

• WaferMax Z

Ordering Information

Ordering Example

WaferMax Z

-NC

-LTAS

Ordering Options

Series	Limit Switches	Encoder
WaferMax Z	-NC -NO	-LTAS

WaferMax Z

Option	Description
WaferMax Z	Direct-drive vertical stage

Limits

Option	Description
-NC	Normally closed end of travel limit switches (STANDARD)
-NO	Normally open end of travel limit switches

Encoder

Option	Description
-LTAS	Linear encoder; amplified sine output