● 高分辨率(2 nm)，重復性(75 nm)和精度(300 nm)
● 定位穩(wěn)定性<2 nm
● 抗蠕變交叉滾柱軸承
● 高動態(tài)性能
Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages have been preserved in the ANT95-L-Z family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-L-Z stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
The ANT95-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user-adjustable from 0 to 5 kg.
Flexible System Design
The ANT95-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-L-Z stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.