ANT95-L-Z系列Z軸直驅(qū)納米定位平臺(tái) | ANT95-L-Z Series Single-Axis Z Direct-Drive Nanopositioning Stages | ANT95-L-Z Series Mechanical Bearing, Linear Motor Vertical Stage
The ANT95-L-Z and ANT95-L-Z-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. As an evolution of the ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.
Mechanical Specifications
| Model | ANT95-25-L-Z | ANT95-25-L-Z-PLUS | ANT95-50-L-Z | ANT95-50-L-Z-PLUS | |
|---|---|---|---|---|---|
| Travel | 25 mm | 25 mm | 50 mm | 50 mm | |
| Accuracy(1) | ±4.0 μm | ±300 nm | ±4.0 μm | ±300 nm | |
| Resolution | 2 nm | 2 nm | 2 nm | 2 nm | |
| Bidirectional Repeatability(1) | ±100 nm | ±75 nm | ±100 nm | ±75 nm | |
| Unidirectional Repeatability | ±50 nm | ±50 nm |
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